High Accuracy Air Flow Sensing Technique for Automobile Engine
نویسندگان
چکیده
منابع مشابه
Novel Air Flow Meter for an Automobile Engine Using a Si Sensor with Porous Si Thermal Isolation
An air flow meter for measuring the intake air of an automobile engine is presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the sensor active elements are integrated. The sensor is mounted on one side of a printed circuit board (PCB), on the other side of which the readout a...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2006
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.126.381